Harness the power of light.SM
SCREEN
Components

Where quality meets precision.

Modules

Explore our GLV modules, available in 1088 and 8192-channel configurations, designed for amplitude or phase modulation across UV, visible, and near-infrared wavelengths.

Modules

Controllers

SLM provides controller cards for evaluation and production.

Controllers

Solutions

Ready-to-implement solutions provide access to our latest technologies.

Development Kits

A development kit consists of the GLV® module, controller board, firmware, interface cables and operating manual.

Dev Kits

Integrated Solutions

A high-throughput laser micro-machining platform using a programmable multi-spot line beam achieves over 30x the throughput of single-spot systems.

Solutions

Technology

Grating Light Valve (GLV®)

GLV® is a high-performance MEMS device used to modulate or deflect light through diffraction.

GLV®

Planar Light Valve (PLV)

PLV is a 2D version of the GLV® spatial light modulator with a larger illuminated area and more power per pixel.

PLV™

Displacement Phase Modulator (DPM)

Non-contact ribbon or piston optical phase modulators steer and shape laser beams for a wide range of applications.

DPM™

Company

Silicon Light Machines designs and manufactures robust MEMS solutions for industry in the heart of Silicon Valley.

Who is Silicon Light Machines?

Our company's name reflects its Grating Light Valve (GLV®) core: Silicon for materials, Light for optics, and Machines for mechanics.

About SLM

SLM Milestones

Silicon Light Machines (“SLM”) began in 1994 as Echelle Inc. with the goal of commercializing the GLV® for high-resolution display.

SLM History

We’ve come a long way.

Silicon Light Machines (SLM) History

Silicon Light Machines (“SLM”) began in 1994 as Echelle Inc. with the goal of commercializing the GLV® for high-resolution display. After successfully developing a high-definition, full-color laser-based projection display in 2000, the exclusive rights to GLV®-use in this field was acquired by Sony Corporation. Later that year, SLM was acquired by Cypress Semiconductor (San Jose), which had been partnering with SLM for foundry services. The focus of the company shifted to developing a GLV®-based dynamic gain equalizer for the long-haul telecom market. However, with the telecom contraction of 2003, SLM refocused on a development started years earlier with SCREEN (Kyoto, Japan) to apply the GLV® to computer-to-plate (CTP) lithography. Over ten years of cooperative development, this business enjoyed steady growth, culminating with SCREEN’s acquisition of SLM in 2008. Since then, SLM has been engaged in developing new light modulators to serve direct-write applications both within SCREEN and with other customers.

1994

SLM founded to commercialize GLV® technology invented at Stanford University.

1998

SLM introduces worlds first three color HD laser projection display.

SLM introduces worlds first three color HD laser projection display.

2003

SLM introduced F-1088 for GLV<sup>&reg;</sup>-based CTP lithography systems at AGFA & SCREEN.

SLM introduced F-1088 for GLV®-based CTP lithography systems at AGFA & SCREEN.

2004

SLM published pioneering paper on High Speed GLV® MEMS for direct-write lithography.

2006

SLM introduces a high-efficiency G1088 module for CTP.

SLM introduces a high-efficiency G1088 module for CTP.

2008

SLM acquired by Dainippon SCREEN Manufacturing Co. Ltd.

SLM acquired by Dainippon SCREEN Manufacturing Co. Ltd.

2010

SLM produces first Integrated GLV<sup>&reg;</sup> (iGLV) G8192 module for direct-write, ultraviolet lithography.

SLM produces first Integrated GLV® (iGLV) G8192 module for direct-write, ultraviolet lithography.

2011

SCREEN introduces DW3000 for direct-write semiconductor, based on G8192 module, which uses iGLV technology.

SCREEN introduces DW3000 for direct-write semiconductor, based on G8192 module, which uses iGLV technology.

2011

SLM introduces the 1D ribbon-based DPM (D1088-HS) for UV-VIS applications.

SLM introduces the LP1088HS linear PLV for very high-power applications.

SLM demonstrates GLV<sup>&reg;</sup> for laser marking.

SLM demonstrates GLV® for laser marking.

2023

SLM introduces the Katana™ linear PLV-based light engine for laser material processing.

SCREEN introduces LeVina for advanced packaging applications using SLM’s G8192 at 375nm.

SCREEN introduces LeVina for advanced packaging applications using SLM’s G8192 at 375nm.

2024

SLM introduces the 2D PLV<sup>&trade;</sup> and DPM<sup>&trade;</sup> for UV-VIS.

SLM introduces the 2D PLV and DPM for UV-VIS.